Nanotechnology at the University of Minnesota

Campbell contact info;
Authors:
Fedorenko, YG; Truong, L; Afanas'ev, VV; Stesmans, A; Zhang, Z; *Campbell, SA*; 
Title:
Impact of nitrogen incorporation on interface states in (100)Si/HfO2
Source:
MICROELECTRONICS RELIABILITY 45 (5-6): 802-805 2005
ISSN:
0026-2714