Nanotechnology at the University of Minnesota

Campbell contact info;
Authors:
Stesmans, A; Afanas'ev, VV; Chen, F; *Campbell, SA*; 
Title:
Detection of nitrogen incorporation in nm-thin HfO2 layers on (100)Si by electron spin resonance
Source:
MATERIALS SCIENCE IN SEMICONDUCTOR PROCESSING 7 (4-6): 197-202 2004
ISSN:
1369-8001