Nanotechnology at the University of Minnesota

Drayton contact info; Ziaie contact info;
Authors:
Pan, T; Baldi, A; Davies-Venn, E; *Drayton, RF*;  *Ziaie, B*; 
Title:
Fabrication and modeling of silicon-embedded high-Q inductors
Source:
JOURNAL OF MICROMECHANICS AND MICROENGINEERING 15 (4): 849-854 2005
ISSN:
0960-1317