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Girshick, SL -- Mech Eng, Gerberich, WW -- CEMS, Zachariah, MR -- Mech Eng

Girshick contact info; Gerberich contact info; Zachariah contact info;
Authors:
Liao, F; *Girshick, SL*;  Mook, WM; *Gerberich, WW**Zachariah, MR*
Title:
Superhard nanocrystalline silicon carbide films
Source:
APPLIED PHYSICS LETTERS 86 (17): 171913 2005
ISSN:
0003-6951
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