Nanotechnology at the University of Minnesota

Kortshagen contact info; Girshick contact info;
Authors:
Warthesen, SJ; *Kortshagen, U*;  *Girshick, SL*; 
Title:
Numerical simulation of nanoparticle transport during plasma-enhanced chemical vapor deposition
Source:
IEEE TRANSACTIONS ON PLASMA SCIENCE 33 (2): 398-399 2005
ISSN:
0093-3813