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Kortshagen, U -- Mech. Eng., Girshick, SL -- Mech. Eng.

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Authors:
Warthesen, SJ; *Kortshagen, U**Girshick, SL*
Title:
Numerical simulation of nanoparticle transport during plasma-enhanced chemical vapor deposition
Source:
IEEE TRANSACTIONS ON PLASMA SCIENCE 33 (2): 398-399 2005
ISSN:
0093-3813
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