Nanotechnology at the University of Minnesota

Rajamani contact info; Nelson contact info;
Authors:
Piyabongkam, D; Sun, Y; *Rajamani, R*;  Sezen, A; *Nelson, BJ*; 
Title:
Travel range extension of a MEMS electrostatic microactuator
Source:
IEEE TRANSACTIONS ON CONTROL SYSTEMS TECHNOLOGY 13 (1): 138-145 2005
ISSN:
1063-6536