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Campbell, SA -- ECE, Gladfelter, WL -- Chem

Campbell contact info; Gladfelter contact info;
Authors:
Zhong, LJ; Daniel, WL; Zhang, ZH; *Campbell, SA**Gladfelter, WL*
Title:
Atomic layer deposition, characterization, and dielectric properties of HfO2/SiO2 nanolaminates and comparisons with their homogeneous mixtures
Source:
CHEMICAL VAPOR DEPOSITION 12 (2-3): 143-150 MAR 2006
ISSN:
0948-1907
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