Nanotechnology at the University of Minnesota

Campbell contact info; Gladfelter contact info;
Authors:
Zhong, LJ; Daniel, WL; Zhang, ZH; *Campbell, SA*;  *Gladfelter, WL*; 
Title:
Atomic layer deposition, characterization, and dielectric properties of HfO2/SiO2 nanolaminates and comparisons with their homogeneous mixtures
Source:
CHEMICAL VAPOR DEPOSITION 12 (2-3): 143-150 MAR 2006
ISSN:
0948-1907